JPS6312155U - - Google Patents
Info
- Publication number
- JPS6312155U JPS6312155U JP10708386U JP10708386U JPS6312155U JP S6312155 U JPS6312155 U JP S6312155U JP 10708386 U JP10708386 U JP 10708386U JP 10708386 U JP10708386 U JP 10708386U JP S6312155 U JPS6312155 U JP S6312155U
- Authority
- JP
- Japan
- Prior art keywords
- item
- main body
- function
- switch
- items
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000002513 implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000011017 operating method Methods 0.000 description 1
Landscapes
- Feedback Control In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10708386U JPS6312155U (en]) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10708386U JPS6312155U (en]) | 1986-07-10 | 1986-07-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6312155U true JPS6312155U (en]) | 1988-01-26 |
Family
ID=30983033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10708386U Pending JPS6312155U (en]) | 1986-07-10 | 1986-07-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6312155U (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02125421A (ja) * | 1988-11-04 | 1990-05-14 | Tel Sagami Ltd | 熱処理装置 |
-
1986
- 1986-07-10 JP JP10708386U patent/JPS6312155U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02125421A (ja) * | 1988-11-04 | 1990-05-14 | Tel Sagami Ltd | 熱処理装置 |
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